Detection system for cathodoluminescence analysis

G - Physics – 01 – N

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G01N 23/227 (2006.01) G01N 23/225 (2006.01) H01J 37/244 (2006.01)

Patent

CA 2004551

ABSTRACT A detection system, for use in cathodoluminescence analysis apparatus, includes a screen placed between a sample to be analyzed and a photon detector to intercept electrons backscattered by the sample or otherwise passing towards the detector. The screen is formed from a plate of a glass which is transparent over a wide spectral range, has rather high electrical conductivity, and does not exhibit cathodoluminescence effects.

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