H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/00 (2006.01)
Patent
CA 2604256
The invention relates to a device (10), for application of an even thin fluid, namely phosphoric acid, layer to silicon cells (12) for photovoltaic application, provided with a process chamber (14), with a fluid trough (16) and a high-frequency ultrasound device (11) for conversion of the fluid into a fluid mist (15) and with a transport device (13) for the silicon cells (12) arranged below the fluid mist dropping shaft (25) of the process chamber (14). According to the invention, such a device (10) permitting a more homogeneous application of fluid to the relevant silicon cells with relation to both the surface and the amount applied, may be achieved, whereby the fluid mist dropping shaft (25) of the process chamber (14) has a tapering of the open cross-section thereof in the direction of the transport device (13) and opens out in a through shaft arrangement (40) for the substrates (12) covering the transport device (13) and the open cross-sections of the opening of the fluid mist dropping shaft (25) and the through shaft arrangement (40) match each other and are preferably essentially the same.
L'invention concerne un dispositif (10) servant à appliquer une mince couche de liquide homogène, notamment une couche d'acide phosphorique, sur des cellules de silicium (12) destinées à la photovoltaïque. Ce dispositif comprend une chambre de traitement (14), pourvue d'une cuve à liquide (16) et d'un dispositif acoustique haute fréquence (11) qui transforme le liquide en un brouillard de liquide (15), ainsi qu'un dispositif de transport (13) destiné aux cellules de silicium (12) et placé sous la goulotte à brouillard de liquide (25) de la chambre de traitement (14). L'objectif de l'invention est de créer un dispositif (10) permettant d'appliquer une quantité de liquide sensiblement plus homogène sur la surface des cellules de silicium. A cet effet, la section intérieure de la goulotte (25) de la chambre de traitement (14) se rétrécit en direction du dispositif de transport (13) et la goulotte (25) débouche dans un passage (40) pour le substrat, recouvrant le dispositif de transport (13). En outre, les sections intérieures des extrémités où aboutissent la goulotte (25) et le passage (40) sont adaptées l'une à l'autre et de préférence pratiquement identiques.
Brunner Johann
Buchner Christian
Gentischer Josef
Kalmbach Helmut
Gowling Lafleur Henderson Llp
Schmid Technology Systems Gmbh
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