Device and method for locally producing microwave plasma

Details Device and method for locally producing microwave plasma Device and method for locally producing microwave plasma

H - Electricity

01

J

H01J 37/32 (2006.01)

Patent

CA 2666131

The invention relates to a device for locally producing microwave plasma. Said device comprises at least one microwave supply that is surrounded by at least one dielectric tube (1). At least one of the dielectric tubes, preferably the outer dielectric tube, is partially surrounded by metal cladding (2). A locally delimited plasma is produced by means of the above-mentioned device by shielding microwaves.

L'invention concerne un dispositif permettant de produire localement des plasmas de micro-ondes, qui comprend au moins une alimentation en micro-ondes, entourée par au moins un tube diélectrique (1). Au moins un des tubes diélectrique est entouré, au moins en partie, par une enveloppe métallique (2), le tube muni de ce revêtement étant de préférence le tube diélectrique extérieur. Un plasma limité localement est produit avec un dispositif du type de celui décrit ci-dessus, par blindage contre les micro-ondes.

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