Device and method for monitoring alignment utilizing phase...

G - Physics – 01 – B

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33/53, 88/113.18

G01B 11/26 (2006.01) G01B 11/27 (2006.01)

Patent

CA 1304933

-0- DEVICE AND METHOD FOR MONITORING ALIGNMENT UTILIZING PHASE CONJUGATION ABSTRACT Monitoring alignment of an element(s) is accomplished with a source of radiation (11), an alignment reflecting assembly (12) embedded within or attached to an element (13) whose alignment is to be monitored and a detection assembly (14). Alignment reflecting assembly (12) includes a conventional mirror (16) that reflects a portion of the incident radiation (E) at a reflection angle that is substantially equal in magnitude and opposite in sign to that of the angle at which the incident radiation is incident thereupon. Alignment reflecting assembly (12) also includes a phase conjugate mirror (18) that reflects incident radiation (E) at a reflection angle that is substantially equal in magnitude and sign to that of the angle at which the incident radiation is incident thereupon, i.e., along the path of the incident radiation. The alignment orientation of alignment reflecting assembly (12) and element (13) is determined by monitoring the so-called retro-reflected radiation from the phase conjugate mirror (18) and the reflected radiation from the conventional mirror (16).

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