Device and method for producing high power microwave plasma

Details Device and method for producing high power microwave plasma Device and method for producing high power microwave plasma

H - Electricity

01

J

H01J 37/32 (2006.01)

Patent

CA 2666117

The invention relates to a device for producing high power microwave plasma. Said device comprises at least one microwave supply (1, 2, 4) that is surrounded by at least one dielectric tube. A dielectric fluid flows through the area between the microwave supply and the outer dielectric tube, said dielectric fluid having a small dielectric loss factor tan .delta. in the region of between 10-2 to 10-7. At least the outer dielectric tube of the above mentioned device is cooled by a fluid.

L'invention concerne un dispositif utilisé pour produire des plasmas de micro-ondes de forte puissance, qui présente au moins une alimentation en micro-ondes (1, 2, 4), entourée par au moins un tube diélectrique. L'espace compris entre l'alimentation en micro-ondes et le tube diélectrique extérieur est parcouru par un fluide diélectrique, ledit fluide diélectrique présentant un faible facteur de perte diélectrique tan delta de l'ordre 10-2 à 10-7. Au moins le tube diélectrique extérieur du dispositif décrit ci-dessus est refroidi par un fluide.

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