H - Electricity – 05 – H
Patent
H - Electricity
05
H
H05H 1/46 (2006.01) H01J 37/32 (2006.01)
Patent
CA 2666125
The invention relates to a device for producing microwave plasma with a high plasma density, comprising at least one microwave supply that is surrounded by an outer dielectric tube (3). Said microwave supply is surrounded by, in addition to the outer dielectric tube (3), at least one inner dielectric tube (2) that extends inside the outer dielectric tube (3). Said tubes (2, 3) form at least one area that is suitable for receiving and conducting a fluid. The above mentioned device can be cooled by means of a fluid. A process gas can be fed (7) into the plasma region by the outer dielectric tube (3).
L'invention concerne un dispositif pour produire des plasmas de micro-ondes de haute densité plasmatique, qui présente au moins une alimentation en micro-ondes, entourée par un tube diélectrique extérieur (3). L'alimentation en micro-ondes est entourée, outre par un tube diélectrique extérieur (3), par un tube diélectrique intérieur (2), qui s'étend à l'intérieur du tube diélectrique extérieur (3). Les tubes (2, 3) forment au moins un espace se prêtant à recevoir et à faire passer un fluide. Le dispositif décrit ci-dessus peut être refroidi par un fluide. Un gaz de traitement peut être acheminé jusqu'à la zone de plasma par le tube diélectrique extérieur (3).
Blake Cassels & Graydon Llp
Iplas Innovative Plasma Systems Gmbh
LandOfFree
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