Device and process for the vaporisation of material

Details Device and process for the vaporisation of material Device and process for the vaporisation of material

C - Chemistry, Metallurgy

23

C

C23C 14/32 (2006.01) C23C 14/24 (2006.01) H01J 37/305 (2006.01) H01J 37/32 (2006.01)

Patent

CA 2099132

The invention relates to a device for vaporizing material by means of a vacuum arc discharge using a cold cathode and a hot self-consuming anode, wherein the crucible (7) consists of an electrically conductive and heat-conductive material, and the connecting member (7a), due to its material properties or geometrical properties, permits electrically conductive and heat-insulating attachment of crucible (7) to the anode base plate (6), and the crucible (7) is arranged laterally above the working surface of the cathode (2a) that close to said working surface that the solid angle formed by the metal vapor plasma (9) flowing off from the anode crucible (7) is just not decreased by the diaphragm (13) in such fashion that homogenous vapor coating of substrates above the crucible (7) is no longer possible. Cathode (2) and anode are arranged opposite to each other. Furthermore, the invention relates to a process for vaporizing material, wherein the plasma jets (5a,5b) emerging from the cathode surfaces are unimpeded in their action on the outer wall (7a) of the crucible and on the material vapor (9) above the crucible so that a high degree of vaporization is obtained, and the crucible (7) consists of an electrically conductive and heat conductive material.

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