Device for analysing a surface layer by means of ion scattering

Details Device for analysing a surface layer by means of ion scattering Device for analysing a surface layer by means of ion scattering

H - Electricity

01

J

358/12, 358/5, 3

H01J 37/252 (2006.01) H01J 49/48 (2006.01)

Patent

CA 996685

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