C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 14/50 (2006.01) C23C 14/24 (2006.01)
Patent
CA 2561976
Disclosed is a device for coating both sides of substrates (10) with a hydrophobic layer in a vacuum coating system (20). Said device comprises a substrate holder (26), on one side of which a first evaporator (48) is disposed for evaporating a substance that forms the hydrophobic layer. A second evaporator (50) is arranged on the side located opposite said one side.
L'invention concerne un dispositif de revêtement bilatéral de substrats (10) au moyen d'une couche hydrophobe dans un dispositif de revêtement sous vide (20), comportant un porte-substrat (26). Un premier évaporateur (48) destiné à faire évaporer une substance produisant la couche hydrophobe est disposé sur un côté du porte-substrat (26). Un deuxième évaporateur (50) est disposé sur le côté opposé audit côté.
Fuhr Markus
Wicht Manfred
Winter Karl-Heinz
Zueltzke Walter
Carl Zeiss Vision Gmbh
Leybold Optics Gmbh
Robic
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