Device for controlling an apparatus generating a charged...

Details Device for controlling an apparatus generating a charged... Device for controlling an apparatus generating a charged...

H - Electricity

01

J

H01J 37/304 (2006.01) H01J 37/305 (2006.01)

Patent

CA 2466936

The invention concerns a device for controlling an apparatus generating a charged particle beam. Said device comprises control means (40) for storing the desired characteristics for the beam (14), determining parameter values for controlling the apparatus (2) based on said characteristics, storing said values and supplying said stored values to the parameters controlling the apparatus. The invention is in particular applicable to the manufacture of nanostructures.

Dispositif de réglage d'un faisceau de particules chargées.Ce dispositif comprend des moyens de réglage (40) pour mémoriser les caractéristiques souhaitées pour le faisceau (14), déterminer les valeurs des paramètres de réglage de l'appareil (2) en fonction de ces caractéristiques, mémoriser ces valeurs et donner ces valeurs mémorisées aux paramètres de réglage de l'appareil. L'invention s'applique notamment à la fabrication de nano- structures.

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