Device for conveying substrates through a substrate...

Details Device for conveying substrates through a substrate... Device for conveying substrates through a substrate...

Category

H - Electricity

Subcategory

01

Subsubcategory

L

IPC codes

H01L 21/00 (2006.01) B65G 15/00 (2006.01) B65G 49/07 (2006.01) G11B 23/00 (2006.01) H01L 21/677 (2006.01) H01L 21/68 (2006.01) G11B 7/26 (2006.01)

Type

Patent

Patent number

CA 2285393

Description

In order to obtain a device as simple and flexible as possible for conveying substrates (7) through a substrate processing plant (11), the device has a base conveyor belt (2) and two lateral conveyor belts (4, 6) which are all provided with notches for holding the substrates (7) in an upright position.

Afin d'obtenir un dispositif aussi simple et flexible que possible de transport de substrats (7) à travers une installation (11) de transport de substrats, le dispositif comprend une bande de base de transport (2) et deux bandes latérales de transport (4, 6) qui sont toutes pourvues d'encoches de réception des substrats (7) dans une position verticale.

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