G - Physics – 03 – F
Patent
G - Physics
03
F
G03F 9/00 (2006.01) H05K 3/00 (2006.01)
Patent
CA 2622359
The invention relates to a device for determining the relative position in the X-Y plane of two substantially flat elements (2,3), which are arranged at a distance in the Z-direction substantially one above the other, using at least one optical sensor (6-8) which is arranged between the elements, with which at least two points on each of the mutually facing sides of the elements can be sensed, and using an evaluation unit, in which the images of the points are evaluated with respect to their relative position in the X-Y plane. The optical sensor comprises at least one line sensor (7,8), which can be moved relative to the two elements such that the mutually facing sides of the elements can at least in sections be optically scanned in the manner of a scanner.
L'invention concerne un dispositif de détermination de la position relative dans le plan X-Y entre deux éléments (2, 3) essentiellement plats, essentiellement superposés à un espace dans la direction Z. Le dispositif selon l'invention comporte au moins un enregistreur optique (6-8) permettant d'enregistrer au moins deux points sur les surfaces des éléments se faisant face, et une unité d'évaluation dans laquelle les images des points sont évaluées en ce qui concerne leur position relative dans le plan X-Y. L'enregistreur optique comporte au moins un capteur à lignes (7, 8) pouvant coulisser par rapport aux éléments de telle manière que les surfaces des éléments se faisant face peuvent être balayées optiquement au moins partiellement à la manière d'un scanner.
Cannon Mark
Grumm Harald
Huebsch Wolfram
Kurtz Rainer
Ersa Gmbh
Norton Rose Or S.e.n.c.r.l.,s.r.l./llp
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