Device for drying substrates

Details Device for drying substrates Device for drying substrates

G - Physics

11

B

G11B 7/26 (2006.01) F26B 3/28 (2006.01) F26B 15/04 (2006.01)

Patent

CA 2288124

The invention relates to a device for drying disk substrates (3) by means of exposure to ultraviolet light. A glass plate (11) lies on the disk substrate (3) during this process. The aim of the invention is to provide simple technical means for ensuring a low level of waste and a better quality disk substrate with a device which is easy to handle. To this end, the inventive device has an upper part (6) which can be raised and lowered, for lowering the glass plate onto the disk substrate (3), said disk substrate lying on a lower part (23).

L'invention concerne un dispositif pour sécher des substrats sous forme de disques (3), en les exposant à un rayonnement ultraviolet, une plaque de verre (11) étant placée sur le substrat sous forme de disque (3) pendant le processus d'exposition au rayonnement. Selon ce système, on parvient à l'aide de moyens techniques simples et avec une manipulation aisée du dispositif, à des quantités réduites de rebuts et à des substrats sous forme de disques de meilleure qualité, de par la présence d'une partie supérieure (6) pouvant être soulevée et abaissée, qui abaisse la plaque de verre (11) sur le substrat sous forme de disque (3) situé sur la partie inférieure (23).

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