G - Physics – 01 – N
Patent
G - Physics
01
N
G01N 21/21 (2006.01) G01B 11/06 (2006.01)
Patent
CA 2431943
The invention concerns a device for ellipsometric two-dimensional display of a sample placed in an incident medium, observed between an analyser and a polarizer intersected by convergent light reflection, wherein the ellipsometric parameters of the assembly formed by the sample and a substrate whereon it is placed, are used. The substrate comprises a support and a stack of base layers and its ellipsometric properties are known. The ellipsometric properties of the substrate are such that variations of the sample ellipsometric parameters are displayed with contrast higher that the contrast produced in the absence of said substrate. The invention also concerns a display method and an ellipsometric measurement method with spatial resolution.
La pr~sente invention concerne un dispositif de visualisation bidimensionnelle ellipsom~trique d'un ~chantillon plac~ dans un milieu incident, observ~ entre un analyseur et un polariseur crois~s par r~flexion en lumire convergente, dans lequel les paramtres ellipsom~triques de l'ensemble form~ par l'~chantillon et un substrat sur lequel il est plac~, sont exploit~s. Le substrat comporte un support et un empilement de couches de base et ses propri~t~s ellipsom~triques sont connues. Les propri~t~s ellipsom~triques du substrat sont telles que les variations des paramtres ellipsom~triques de l'~chantillon soient visualis~es avec un contraste sup~rieur au contraste produit en l'absence de ce substrat. L'invention concerne ~galement un proc~d~ de visualisation et un proc~d~ de mesure ellipsom~trique avec r~solution spatiale.
Ausserre Dominique
Valignat Marie-Pierre
Centre National de La Recherche Scientifique
Gowling Lafleur Henderson Llp
Universite Pierre Et Marie Curie
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