Device for exciting a gas by a surface wave plasma and gas...

H - Electricity – 05 – H

Patent

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H05H 1/46 (2006.01) B01J 19/08 (2006.01)

Patent

CA 2235648

This device for exciting a gas, of the surfaguide type, comprises a hollow structure (24) forming a waveguide, this hollow structure being intended to be connected to a microwave generator and provided with a passage (38) through which a hollow dielectric tube (40) passes, through which tube the gas to be excited flows, and with a region (30) for concentrating the waves produced by the generator onto the dielectric tube. It furthermore includes at least one electromagnetic screening sleeve (42, 44) made of a conductive material, fastened to the said structure (24) and extending along the extension of the said passage (38) so as to surround the said hollow tube.

L'invention porte sur un dispositif d'excitation d'un gaz, du type surfaguide, qui comporte une structure creuse (24) formant un guide d'ondes. Cette structure creuse doit être reliée à un générateur de micro ondes et comprend un passage (38) à travers lequel passe un tube diélectrique creux (40), dans lequel s'écoule le gaz. La structure comporte également une région (30) qui concentre, sur le tube diélectrique, les ondes produites par le générateur. De plus, elle inclut au moins une gaine électromagnétique de filtrage (42, 44), faite d'une matière conductrice, qui est fixée à la structure en question (24) et qui se prolonge le long de la rallonge du passage (38) susmentionné de façon à encercler le tube creux.

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