Device for fixing substrates

Details Device for fixing substrates Device for fixing substrates

H - Electricity

01

L

H01L 21/00 (2006.01) C23C 14/50 (2006.01) F16B 19/10 (2006.01) G11B 7/26 (2006.01) H01L 21/687 (2006.01) G11B 17/028 (2006.01) G11B 23/00 (2006.01)

Patent

CA 2329118

The invention relates to a device for fixing substrates, each of which have an inner cavity, with an element which can be introduced into said inner cavity. Said device also has an axially moveable inner member (30) and an outer member (20) which can be expanded by means of a relative movement of the members.

L'invention concerne un dispositif pour fixer des substrats qui présentent chacun un orifice interne, ledit dispositif comportant un élément qui peut être introduit dans cet orifice interne. Ce dispositif comporte un organe interne (30) pouvant être déplacé axialement et un organe externe (20) pouvant être élargi par un mouvement relatif desdits organes.

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