Device for generating cold plasma in a vacuum chamber and...

H - Electricity – 05 – H

Patent

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H05H 1/24 (2006.01)

Patent

CA 2677227

The invention relates to a device for generating a cold plasma in a vacuum chamber and to the use of said device for thermo-chemical processing. The device includes a cathode (1) with hollow cavities (1a) for confining the plasma. Means (2) are provided about each hollow cavity (1a), and said means are capable of generating a magnetic field that forces the electrons to revolve about the field lines, the body of the cathode (1) interacting with a member (3) that allows for a flow of coolant for extracting the calories generated by the intense ionic bombarding at each one of said hollow cavities (1a).

Dispositif pour générer un plasma froid dans une enceinte sous vide et utilisation du dispositif pour des traitements thermochimiques. Le dispositif comprend une cathode (1) présentant des chambres creuses (1a) pour le confinement du plasma, Des moyens (2) sont disposés autour de chaque chambre creuse (1a) et aptes à créer un champ magnétique obligeant les électrons à tourner autour des lignes des champs, le corps de la cathode (1) coopérant avec un élément (3) apte à permettre la circulation d un fluide de refroidissement pour extraire les calories générées par un bombardement ionique intense au niveau de chacune des chambres creuses (1a).

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