Device for generating powerful microwave plasmas

Details Device for generating powerful microwave plasmas Device for generating powerful microwave plasmas

H - Electricity

01

J

H01J 37/32 (2006.01) H05H 1/46 (2006.01)

Patent

CA 2248250

In a device for the production of powerful micro- wave plasmas, the resonator is designed as a coaxial resonator with inner and outer conductors. The microwaves are coupled into the plasma chamber via the boundaries of the coaxial resonator.

L'invention concerne un dispositif pour produire des plasmas hyperfréquence puissants, le résonateur dans ce dispositif se présentant sous la forme d'un résonateur coaxial avec des conducteurs intérieurs et extérieurs. Les micro-ondes sont couplées dans la chambre à plasma par l'intermédiaire des délimitations du résonateur coaxial.

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