H - Electricity – 01 – J
Patent
H - Electricity
01
J
313/23
H01J 35/20 (2006.01) G03F 7/20 (2006.01) H05G 2/00 (2006.01) H05H 1/24 (2006.01)
Patent
CA 2023410
A device (10) for generating X-radiation (20) with a plasma source having two concentric cylindrical electrodes (11, 12), which can be connected to a high-voltage electrical energy source with a controlled high-power switch and which exhibit between them a discharge space (13) filled with low- pressure gas by means of evacuation, at one closed end (14) of which discharge space an insulator (15) is arranged between said electrodes (11, 12) and there is an initiating means (16) for a plasma discharge, whose plasma (17) can be accelerated to the other end (18) and, in the region of the open end (19) of the cylindrical inner electrode (12), can be compressed into a plasma focus (21) emitting X-radiation (21). In order to optimize the generation of X-radiation, a procedure is followed such that the gas between the electrodes (11, 12) is a gas (discharge gas) optimal for initiation of the plasma discharge and/or for plasma acceleration, that a gas (emitting gas) optimal for the X- radiation (20) to be generated is present at least in the region of the open end (19) of the inner electrode (12), and that the two gases (emitting gas and discharge gas) can be evacuated so as to assure a discharge space (13) with the least possible intermixing.
Holz Raymond
Lebert Rainer
Neff Willi
Richter Franz
Carl-Zeiss Smt Ag
Carl-Zeiss-Stiftung A. Foundation Established Under The Laws Of Germany
Robic
LandOfFree
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