Device for holding substrates

Details Device for holding substrates Device for holding substrates

B - Operations, Transporting

05

C

B05C 13/02 (2006.01) C23C 14/04 (2006.01) C23C 14/50 (2006.01) C23C 16/04 (2006.01) C23C 16/458 (2006.01)

Patent

CA 2096274

LYB 338-JEL/FBF ABSTRACT OF THE DISCLOSURE Holder for a planar substrate includes a first portion with a lip angled toward a front surface of the substrate, which surface is to be coated, and a resilient mask fixed to the inside of the first portion and extending beyond the lip. The holder further includes a rear portion facing the substrate opposite the coating source, and leaf springs fixed to the rear portion for urging the substrate against the mask.

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