G - Physics – 11 – B
Patent
G - Physics
11
B
G11B 7/26 (2006.01) B29C 65/48 (2006.01)
Patent
CA 2439590
The invention relates to a device for joining substrates (3, 4) having an inner whole to give a wafer. The aim of the invention is provide a simple and inexpensive device that allows for a simultaneous rotation of the two substrates (3, 4) during gluing. To this end, the device has an element that can be inserted in the inner whole of at least two superimposed substrates (3, 4) and that can be expanded to close an interstice (30) between the substrates.
L'invention concerne un dispositif d'assemblage sous forme d'un disque substrat de substrats (3, 4) présentant un trou intérieur. L'invention vise à mettre en oeuvre de manière simple et économique un tel dispositif permettant une rotation simultanée des deux substrats (3, 4) lors du processus d'encollage. A cet effet, le dispositif selon l'invention présente un élément pouvant être inséré dans le trou intérieur d'au moins deux substrats superposés (3, 4), ledit élément pouvant s'écarter de manière à fermer un espace intermédiaire (30) entre les substrats.
Hupp Alexander
Michels Frank
Speer Ulrich
Wagner Roland
Robic
Steag Hamatech Ag
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