Device for loading and unloading substrates

Details Device for loading and unloading substrates Device for loading and unloading substrates

H - Electricity

01

L

H01L 21/00 (2006.01) G11B 23/00 (2006.01) H01L 21/677 (2006.01)

Patent

CA 2388586

The invention relates to a device (1; 1a; 1b) for loading and unloading of substrates using a conveyor device (83; 3a; 3b) which is used to convey a substrate in a linear manner comprising at least one handling facility which can be rotated (4, 5; 4a) and which is intended for the transport of said substrate between said conveyor device (3; 3a; 3b) and at least one process station (6A to D, 7A to D; 80A to H) wherein a small number of components are used and a small amount of space is taken up when the conveyor device (3; 3a; 3b) is arranged between at least two process stations (6A to D, 7A to D; 80A to H) and the at least one handling facility (4, 5; 4a) above said conveyor device (3; 3a; 3b).

L'invention concerne un dispositif (1; 1a; 1b) de chargement et de déchargement de substrats, comportant un dispositif de convoyage (3; 3a; 3b) destiné au transport linéaire des substrats, et au moins un dispositif de maniement (4, 5; 4a) destiné au transport des substrats entre le dispositif de convoyage (3; 3a; 3b) et au moins une station de procédé (6A jusqu'à D, 7A jusqu'à D; 80A jusqu'à H). Ce dispositif requiert un nombre inférieur de composants et un espace réduit lorsque le dispositif de convoyage (3; 3a; 3b) est disposé entre deux stations de procédé (6A jusqu'à D, 7A jusqu'à D; 80A jusqu'à H) et le ou les dispositifs de maniement (4, 5; 4a), au dessus du dispositif de convoyage (3; 3a; 3b).

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