Device for operating gas in vacuum or low-pressure...

Details Device for operating gas in vacuum or low-pressure... Device for operating gas in vacuum or low-pressure...

H - Electricity

01

J

H01J 37/02 (2006.01) H01J 37/26 (2006.01)

Patent

CA 2518520

A device for operating gas in the vacuum or low-pressure environment and for observation of the operation includes a housing. The housing has a thinner part formed at a side thereof, and at least one spacer mounted therein for partitioning off its inside into a gas chamber and at least one buffer chamber outside the gas chamber. The gas chamber has two inner apertures provided on the spacers above and below the gas chamber. The housing has two outer apertures provided respectively on a top side thereof and a bottom side thereof. All of the inner and outer apertures are coaxial with one another and located on the thinner part. The housing has a pumping port for communication with the buffer chamber, and a gas inlet for communication with the gas chamber.

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