Device for photolithographically treating a thin substrate

Details Device for photolithographically treating a thin substrate Device for photolithographically treating a thin substrate

H - Electricity

01

L

356/177, 356/192

H01L 21/02 (2006.01) G03F 7/20 (2006.01)

Patent

CA 1206629

Abstract: Device for photolithographically treating a thin substrate. A device for photolithographically treating a thin substrate comprises pre-alignment station, a substrate-supporting table and a transport arm which is provided with a vacuum connection for holding the substrate by suction at its lower side during transport of the sub- strate from the pre-alignment station to the substrate table. The sub- strate table is provided with supporting means for the substrate which are adjustable in the direction of height and which have a supporting surface which is adjustable to a distance above the substrate table exceeding the thickness of the transport arm and is adjustable in a downward direction at least through a distance such that the supporting surface is level with the upper surface of the substrate table, the supporting means leaving a space free for the movement of the transport arm above a part of the substrate table.

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