Device for producing excited/ionized particles in a plasma

Details Device for producing excited/ionized particles in a plasma Device for producing excited/ionized particles in a plasma

H - Electricity

01

J

H01J 37/32 (2006.01) H05H 1/46 (2006.01)

Patent

CA 2314922

According to this invention, a device is described to generate excited and/or ionized particles in a plasma with a generator to generate an electromagnetic wave and at least one plasma zone, in which the excited and/or ionized particles are formed by the electromagnetic wave. The device according to this invention is characterized in that the plasma zone is formed in the interior chamber of the coaxial conductor for the electromagnetic wave.

L'invention concerne un dispositif pour produire des particules excitées et/ou ionisées dans un plasma. Ce dispositif comprend un générateur servant à produire une onde électromagnétique et au moins une zone de plasma dans laquelle les particules excitées et/ou ionisées sont formées par l'intermédiaire de l'onde électromagnétique. Ce dispositif est caractérisé en ce que la zone de plasma est formée à l'intérieur d'un conducteur coaxial servant à acheminer l'onde électromagnétique.

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