Device for the pixel-by-pixel photoelectric measurement of a...

H - Electricity – 01 – L

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H01L 27/146 (2006.01) G01J 3/28 (2006.01) G01J 3/36 (2006.01) G01J 3/46 (2006.01) G01J 3/51 (2006.01) G01N 21/25 (2006.01) G01N 21/27 (2006.01) H04N 1/00 (2006.01) H04N 7/18 (2006.01) G01J 3/02 (2006.01) G01J 3/52 (2006.01) G01N 21/31 (2006.01)

Patent

CA 2364547

The device for the pixel-by-pixel photoelectric measurement of a planar measured object includes projection means (3,21) for the imaging of the measured object (M) onto a two-dimensional CCD image sensor (22), filter means (66) provided in the imaging light path for the wavelength selective filtering of the measuring light impinging on the image sensor, signal processing means (23) for the processing of the electrical signals produced by the image sensor and for the conversion thereof into corresponding digital raw measured data (71), as well as data processing means (7) for the processing of the raw measured data into image data (72) representing the colors of the individual image elements of the measured object. Furthermore, illumination means (4,41-43; 5,51- 53) are provided which include a Fresnel lens (42:52), which illuminate the measured object (M) with at least one essentially parallel light bundle under an angle of incidence (.alpha.) of essentially 45° +/- 5°. The projection means which include at least one tele-lens (3) constructed as a Fresnel lens, are constructed as tele-centrical imaging optics (3,21), which image each point of the measured object (M) under essentially the same angle of observation of essentially 0° and with essentially the same aperture angle (.omega.) of essentially maximally 5° onto the light converter element array (22). The data processing means (7) carry out extensive correction measures. These include a geometrical correction of the image data, a reflex correction for the elimination of reflection effects, a scattered light correction for elimination of scattered light influences, a white normalization and border white normalization for compensation of variations in the illumination intensity and a spectral correction for compensation of the angle of incidence depending on spectral characteristics of the filter means (66). The device allows a simultaneous point by point measurement of a larger planar measured object which is sufficiently precise for the colorimetric application while adhering to the geometric conditions required for color measurements for each image point of the measured object.

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