Device for the preparation of a gas mixture

H - Electricity – 01 – S

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H01S 3/036 (2006.01) H01J 7/14 (2006.01) H01S 3/041 (2006.01)

Patent

CA 1303357

Abstract of the Disclosure A device for the preparation of a gas mixture includes a closed circuit. Mixture components of a gas mixture are fed with greatly differing partial pressures ranging from low to highest partial pressures to the closed circuit. The gas mixture is circulated in the closed circuit. At least one of the mixture components with low partial pressure is replenished at increasingly shorter intervals. The gas mixture is completely exchanged when a given minimal length of the intervals is reached. At least one branch parallel to a section of the closed circuit conducts the gas mixture substantially completely free of flow losses. The at least one branch includes a magnetic valve, a differential pres- sure sensor in series with the magnetic value having a total measuring range corresponding to the low partial pressures, the differential pressure sensor controlling the replenish- ment of the mixture components having the low partial pressure exclusively while the magnetic valve is closed, and an absolute pressure sensor controlling at least the replen- ishment of the mixture component having the highest partial pressure.

548203

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