Device for the production of homogenous microwave plasma

Details Device for the production of homogenous microwave plasma Device for the production of homogenous microwave plasma

H - Electricity

01

J

H01J 37/32 (2006.01)

Patent

CA 2294197

A device for generating microwave plasmas and having a microwave generator, a chamber feeding microwaves, and a plasma chamber with receptacles, if appropriate, is proposed, the chamber being of cylindrical construction. The plasma chamber preferably comprises the cylindrical chamber completely or partially. Coupling points are arranged in the common wall, preferably as slot couplers.

L'invention concerne un dispositif pour la production pour la production de plasmas hyperfréquences, comportant un générateur hyperfréquence (1) une chambre (2) acheminant les micro-ondes, une chambre à plasma (5) comprenant éventuellement des récipients, la chambre (2) présentant une configuration cylindrique. La chambre à plasma (5) entoure de préférence totalement ou partiellement la chambre cylindrique (2). Les points de couplage sont disposés dans la paroi commune, de préférence sous forme de coupleurs à fentes.

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