C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 16/04 (2006.01) B05B 7/14 (2006.01) B05C 7/02 (2006.01) C08J 7/04 (2006.01) C23C 16/50 (2006.01) C23C 16/511 (2006.01) H01J 37/32 (2006.01)
Patent
CA 2370337
The invention concerns a device for treating with microwave plasma a container, characterised in that the container is placed in a chamber (12) made of a conductive material and is rotationally symmetrical, and the device comprises a wave guide tunnel (15) substantially perpendicular to the axis (A1) of the chamber and which emerges therein in the form of a rectangular window whereof the smaller dimension corresponds to its dimension along the chamber axis, and the internal diameter of the chamber (12) is such that the microwaves are propagated in the chamber mainly according to a mode whereby the electric field resulting from the propagation of the microwaves exhibit an axial rotational symmetry.
L'invention propose un dispositif pour traitement par plasma micro-ondes d'un récipient, caractérisé en ce que le récipient est placé dans une enceinte (12) en matériau conducteur qui est cylindrique de révolution, en ce que le dispositif comporte un tunnel guide d'onde (15) qui est sensiblement perpendiculaire à l'axe (A1) de l'enceinte et qui débouche dans celle-ci sous la forme d'une fenêtre rectangulaire dont la plus petite dimension correspond à sa dimension selon la direction de l'axe de l'enceinte, et en ce que le diamètre interne de l'enceinte (12) est tel que les micro-ondes se propagent dans l'enceinte principalement selon un mode dans lequel le champ électrique résultant de la propagation des micro-ondes présente une symétrie axiale de révolution.
Goudreau Gage Dubuc
Sidel Actis Services
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