Device for treating objects by plasma deposition

Details Device for treating objects by plasma deposition Device for treating objects by plasma deposition

H - Electricity

01

J

H01J 37/32 (2006.01) H01L 21/00 (2006.01)

Patent

CA 2469863

The invention concerns a device for treating objects by plasma deposition comprising: a sealed treatment chamber (1), under reduced pressure, provided on one of its walls (4) with a passageway (2) capable of being closed, said passageway (2) enabling to feed objects to be treated (3) between the inside and the outside of the treatment chamber (1); a transfer space (5) capable of communicating, via said passageway (2), with the treatment chamber (1), so that the objects to be treated (3) are introduced into the transfer space (5) prior to being introduced into the treatment chamber (1). Said device is characterized in that the transfer space (5): delimited by discontinuous walls (6, 7), is mobile relative to the treatment chamber (1) so as to be able to move across the passageway (2) of the treatment chamber (1).

Dispositif pour le traitement d'objets par déposition plasma comprenant: une chambre de traitement étanche (1), sous pression réduite, pourvue sur l'une de ses parois (4) d'un passage (2) pouvant être obturé, ledit passage (2) permettant d'acheminer des objets à traiter (3) entre l'intérieur et l'extérieur de la chamb re de traitement (1), un espace de transfert (5) pouvant être mis en relation, via ledit passage (2), avec la chambre de traitement (1) de façon à ce que des objets à traiter (3) soient introduits dans l'espace de transfert (5) préalablement à leur introduction dans la chambre de traitement (1), le dispositif étant caractérisé par le fait que l'espace de transfert (5): est délimité par des parois discontinues (6, 7), est mobile relativement à la chambre de traitement (1) de façon à pouvoir franchir le passage (2) de la chambre de traitement (1).

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