Device including a substrate-supported optical waveguide,...

Details Device including a substrate-supported optical waveguide,... Device including a substrate-supported optical waveguide,...

G - Physics

02

B

26/197, 88/97.6

G02B 6/12 (2006.01) G02B 6/10 (2006.01)

Patent

CA 1323783

Abstract In the manufacture of optical devices such as, e.g., optical communications assemblies and optical gyroscopes, low-loss substrate-supported optical waveguides are desired. Such waveguides can be obtained by patterning a layer of deposited waveguide material and, in the interest of minimizing loss asmay be due to processing-induced surface roughness, waveguides as patterned preferably undergo a heat treatment which results in surface smoothing and in rounding of the waveguide cross section. Furthermore, in the interest of avoiding re-entrant corners between substrate and waveguide, a wetting layer may be applied to the waveguide prior to heat treatment.

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