H - Electricity – 03 – H
Patent
H - Electricity
03
H
H03H 9/02 (2006.01) H03H 3/08 (2006.01) H03H 9/10 (2006.01)
Patent
CA 2321905
The invention concerns a surface acoustic wave device comprising a fine piezoelectric material film, a molecular glue layer and a bearing substrate. The fine film constitutes a sound energy guide enabling to increase the performance levels of the device. The invention also concerns methods for making said sound wave device, comprising in particular a step which consists in molecular bonding between a bearing substrate and a piezoelectric substrate, then a step reducing the thickness of the piezoelectric substrate.
L'invention concerne un dispositif à ondes de surface comprenant une fine couche de matériau piézo-électrique, une couche de colle moléculaire et un substrat porteur. La fine couche constitue un guide d'énergie acoustique qui permet d'augmenter les performances du dispositif. L'invention concerne également des procédés pour réaliser le dispositif à ondes acoustiques, comprenant notamment une étape de collage moléculaire entre un substrat porteur et un substrat piézo-électrique, puis une étape de réduction d'épaisseur du substrat piézo-électrique.
Robic
Thomson-Csf
LandOfFree
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