Device with phase-separated dielectric structure

Details Device with phase-separated dielectric structure Device with phase-separated dielectric structure

H - Electricity

01

L

H01L 51/30 (2006.01) H01L 49/02 (2006.01)

Patent

CA 2627496

An electronic device including in any sequence: (a) a semiconductor layer; and (b) a phase-separated dielectric structure comprising a lower-k dielectric polymer and a higher-k dielectric polymer, wherein the lower-k dielectric polymer is in a higher concentration than the higher-k dielectric polymer in a region of the dielectric structure closest to the semiconductor layer.

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