Diamond-like film and process for producing same

Details Diamond-like film and process for producing same Diamond-like film and process for producing same

C - Chemistry, Metallurgy

23

C

204/96.14

C23C 14/34 (2006.01) C03C 17/22 (2006.01) C23C 16/26 (2006.01)

Patent

CA 1202598

NOVEL AND IMPROVED DIAMOND-LIKE FILM AND PROCESS FOR PRODUCING SAME Abstract of the Disclosure An amorphous, carbonaceous, diamond-like film and a process for producing the same is disclosed. The film has an extremely low hydrogen content and an extremely low stress, is resistant to both acids and alkalis, and adheres tenaciously to many type of substrates including glasses, plastic, metals, and semiconductors. The process for producing this film is a hybrid process using radio frequency plasma decomposition of an alkane and a pair of spaced carbon electrodes.

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