Diaphragm deflection sensor for fused silica diaphragm module

Details Diaphragm deflection sensor for fused silica diaphragm module Diaphragm deflection sensor for fused silica diaphragm module

G - Physics

01

L

73/3

G01L 9/00 (2006.01) G01L 11/00 (2006.01)

Patent

CA 1222393

- 11 - DIAPHRAGM DEFLECTION SENSOR FOR FUSED SILICA DIAPHRAGM MODULE ABSTRACT OF THE DISCLOSURE A high temperature pressure transducer and sensing apparatus to determine the deflection of the transducer diaphragm is disclosed. The pressure transducer utilizes a fused silica diaphragm (12) which is illuminated at selected locations by a coherent laser source 62) via opti- cal fibers (38, 46). The light reflected by the diaphragm (12) forms interference fringe patterns which are focused by gradient index rod lenses (36) on the ends of optical fibers (40, 48) for transmission to a fringe counting cir- cuit (54). By digital techniques, the fringe count is converted into a determination of diaphragm deflection.

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