Diaphragm for pressure sensors

Details Diaphragm for pressure sensors Diaphragm for pressure sensors

G - Physics

01

L

113/66, 73/8

G01L 7/08 (2006.01) F16J 3/02 (2006.01) G01L 7/10 (2006.01)

Patent

CA 1127863

DIAPHRAGM FOR PRESSURE SENSORS ABSTRACT A diaphragm consisting of multiple arches con- figured such that radial compliance is increased and pres- sure responsive radial compression loading will approximate radial tension loading resulting from deflection of an associated pressure sensor mechanism. On the pressure receiving side of the diaphragm, a broad shallow convex section extends between two concave sections of tighter curvature. The portions of the concave sections remote from the convex section each extend to a substantially cylindrical configuration. A sharp convex bend extending to a flat radial flange provides an attachment edge with minimum attachment stress. A method of forming such a diaphragm to insure uniform wall thickness by allowing maximum lateral migration of the diaphragm sheet is also disclosed. -1-

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