Die and method of making same

Details Die and method of making same Die and method of making same

C - Chemistry, Metallurgy

23

F

149/10, 204/12

C23F 1/04 (2006.01) H05K 3/04 (2006.01)

Patent

CA 1185151

ABSTRACT OF The DISCLOSURE A method for chemically milling an etchable workpiece by exposure thereof to an enchant in order to mill selected etchant-active areas and thereby form a plurality of raised die ele- ments separated and bounded by a plurality of recessed cavities, which method is comprised of the steps of initially, partially etching the workpiece to form recessed die element pre- cursors separated and bounded by recessed cavi- ties, depositing a film of an etchant-resistant composition on the workpiece in at least selected ones of the recessed cavities, filling those selected cavities with an etchant-resistant filler and then subsequently processing the workpiece. In a highly preferred embodiment, the method comprises depositing a thin film of gold on the workpiece, removing the gold film from selected areas where active etching is to occur, and then filling the recessed cavi- ties with an epoxy filler.

424985

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