H - Electricity – 01 – B
Patent
H - Electricity
01
B
H01B 3/02 (2006.01) H01B 3/10 (2006.01) H01L 49/02 (2006.01) H01L 51/30 (2006.01)
Patent
CA 2524969
A dielectric material prepared from a siloxy/metal oxide hybrid composition, and electronic devices such as thin film transistors comprising such dielectric material are provided herein. The siloxy/metal oxide hybrid composition comprises a siloxy component such as, for example, a siloxane or silsesquioxane. The siloxy/metal oxide hybrid composition is useful for the preparation of dielectric layers for thin film transistors using solution deposition techniques.
Matériau diélectrique préparé à partir d'un composé hybride d'oxyde métallique siloxy et dispositifs électroniques, comme des transistors à couches minces qui comprennent ce matériau diélectrique. Le composés hybride d'oxyde métallique siloxy comprend un composant siloxy, comme du siloxane ou du silsesquioxane. Le composé hybride d'oxyde métallique siloxy est utile dans la préparation de couches diélectriques pour les transistors à couches minces à l'aide de techniques de dépôt de solution.
Liu Ping
Ong Beng S.
Wu Yiliang
Sim & Mcburney
Xerox Corporation
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