G - Physics – 01 – L
Patent
G - Physics
01
L
73/10, 73/3
G01L 7/08 (2006.01) G01L 9/00 (2006.01) G01L 9/12 (2006.01) G01L 13/02 (2006.01)
Patent
CA 1057971
ABSTRACT OF THE DISCLOSURE The present invention is a differential pressure measuring cell which includes first and second input pressure chambers, diaphragms mounted therein, an auxilliary chamber having a relatively flexible diaphragm, and a measuring chamber having a relatively rigid diaphragm. Capacitor sensing foils line the opposite concave walls of the measuring chamber. A first input pressure P1 is communicated, via a first pressure chamber diaphragm to one side of the auxiliary chamber, and via first passages and a first cylindrical recess, to one side of the measuring chamber. Similarly, a second input pressure P2 is communicated, via a second pressure chamber diaphragm, to the other side of the mea- suring chamber, and via second passages and a second cylindrical recess to the other side of the auxiliary chamber. Radial expansion of the auxiliary and measuring chambers and consequent measuring errors due to the resultant diaphragm tensionings, are prevented by the static counterpressures pre- sent in the recesses. Overpressure protection is provided by the small volumes behind the pressure chamber diaphragms and the greater flexibility of the auxiliary diaphragm, whereby the pres- ure chamber diaphragms seat against their adjacent casings and the flexible diaphragm absorbs any excess pressure before the rigid diaphragm engages its chamber walls and becomes deformed thereby.
260862
Tamai Mitsuru
Yasuhara Takeshi
Yuhara Tadanori
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