Differential pressure sensor

G - Physics – 01 – L

Patent

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Details

G01L 9/12 (2006.01) G01L 9/00 (2006.01)

Patent

CA 2320867

The invention concerns a sensor operating on to the double differential capacitor whereof the mobile armature consists of the sensor deformable membrane (7), comprising a measuring circuit (13) of the capacitor capacitance levels, incorporated in the sensor housing (1), consisting in first (13a) and second (13b) double face interconnected circuits, located on each side of the membrane and connected thereto at its peripheral region by connecting means (8), said circuits faces, oriented towards the membrane (7), used for respectively implanting the capacitor armatures (11, 12), and said circuit faces, opposite the membrane (7), comprising each a region whereon are respectively implanted components sensitive to the membrane displacement towards one or the other of the fixed armatures, a region insensitive to the parasite capacitance levels being further provided on one of the latter faces for implanting components forming the rest of the measuring circuit (13).

Ce capteur de pression fonctionnant sur le principe de condensateur double différentiel dont l'armature mobile est constituée par la membrane déformable (7) du capteur, comprend un circuit de mesure (13) des capacités de ce condensateur, incorporé dans le boîtier (1) du capteur, qui se décompose en un premier (13a) et un deuxième (13b) circuits double face interconnectés, lesquels sont situés de chaque côté de la membrane et reliés à celle-ci au niveau de sa région périphérique par des moyens de liaison (8), les faces desdits circuits, orientées vers la membrane (7), servant respectivement à l'implantation des armatures (11, 12) du condensateur, et les faces desdits circuits, opposées à la membrane (7), comprenant chacune une région sur lesquelles sont respectivement implantés des composants sensibles au déplacement de la membrane vers l'une ou l'autre des armatures fixes, une région insensible aux capacités parasites étant en outre prévue sur l'une de ces dernières faces pour l'implantation des composants formant le reste du circuit de mesure (13).

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