Differential pressure transducer

Details Differential pressure transducer Differential pressure transducer

G - Physics

01

L

73/3

G01L 9/12 (2006.01) G01L 9/00 (2006.01) G01L 13/02 (2006.01)

Patent

CA 1141185

245-79-0090 DIFFERENTIAL PRESSURE TRANSDUCER ABSTRACT A differential pressure transducer having a central support structure separating two flexible diaphragms. The support structure has a central hole and the diaphragms are joined on their opposing surfaces at their respective centers by a post that is loosely received through the hole. The central structure and each diaphragm are separated by a annular sealing ring that is preferably fabricated from a glass frit having characteristics similar to the material used for the diaphragms and central structure. The transducer further includes a plurality of electrodes located on one surface of the central support member and a third electrode, located on the inner surface of one of the diaphragms, therein forming the electrodes of a pressure sensing capacitor and a reference capacitor. The transducer further includes a fourth electrode located on the inner surface of the opposing diaphragm wherein the fourth electrode is electrically connected to the third electrode to provide a means for shielding capacitive measurements from stray magnetic and electrical fields.

371146

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