H - Electricity – 01 – J
Patent
H - Electricity
01
J
H01J 37/04 (2006.01) H01J 37/147 (2006.01)
Patent
CA 2115605
Spurious electrodynamic effects are reduced or eliminated by the use of a mechanically compact, low capacitance, geometrically symmetric, differentially-driven blanker assembly. This eliminates the need for internal cables or SMA-type launchers and has a solid metal electromechanical contact to system ground.
Colby David H.
Gesley Mark A.
Etec Systems Inc.
Osler Hoskin & Harcourt Llp
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