Differentially pumped seal apparatus

Details Differentially pumped seal apparatus Differentially pumped seal apparatus

G - Physics

21

K

356/192

G21K 5/08 (2006.01) H01J 37/301 (2006.01)

Patent

CA 1279130

ABSTRACT OF THE DISCLOSURE A differentially pumped seal apparatus (14) comprising a rough port nozzle (R), a medium port nozzle (M) and a high port nozzle (H), each with a centrally located sleeve (34,36,40) defining concentric apertures (44,48,52). Each nozzle is configured as a sector of a circular cylinder which provides for large channels (62,72,76) to be formed for connecting the sleeve apertures (44,48,52) of each nozzle directly to vacuum pumps (46,50,54) to thereby provide a graded seal with high conductance and increased pumping efficiencies, higher vacuum and a smaller gap between the sleeve (34,36,40) and a workpiece (12).

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