Diffraction optical element and transfer mold therefor

Details Diffraction optical element and transfer mold therefor Diffraction optical element and transfer mold therefor

G - Physics

02

B

G02B 5/18 (2006.01) B29C 33/42 (2006.01)

Patent

CA 2426153

A diffraction optical element including an element body having a large number of grooves formed an its surface to form a grating, and a grating shape adjusting layer deposited an a grating surface of the element body by oblique incidence of material particles onto the grating surface, wherein the grating shape adjusting layer perse is made of a reflecting film material. By the grating shape adjusting layer, the contour shape of the resulting grating surface in a section perpendicular to a lengthwise direction of the grooves is made not similar to the sectional shape of the element body. A reflecting film may be formed on a grating shape adjusting layer made of another material. A reflecting film may be provided on the element body before a grating shape adjusting layer made of a transparent dielectric material is provided on the reflecting film.

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