Diffraction type alignment/measurement of configurations on...

Details Diffraction type alignment/measurement of configurations on... Diffraction type alignment/measurement of configurations on...

G - Physics

02

B

33/49

G02B 9/00 (2006.01) G03F 9/00 (2006.01)

Patent

CA 1104338

DIFFRACTION TYPE ALIGNMENT/MEASUREMENT OF CONFIGURATONS ON SPACED PLANES Abstract of the Disclosure A system for measuring the lateral displacement between edges located on two spaced apart objects, with a precision in the order of 1 microinch, generates and analyses the diffraction pattern produced by the physical edge of one object and the aerial image of the edge on the other object. The system can be used for the alignment of the objects or the comparison of patterns located on the objects.

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