Diffractive optical device and method for producing same

Details Diffractive optical device and method for producing same Diffractive optical device and method for producing same

G - Physics

02

B

G02B 5/18 (2006.01) G02B 5/30 (2006.01) G02B 26/08 (2006.01) G02B 27/18 (2006.01)

Patent

CA 2465085

A practical diffractive optical device is efficiently produced at a low cost. A modulated refractive index diffractive optical element comprises a transparent DLC (i.e. diamond-like carbon) film (2) formed on a transparent substrate (1), and the DLC film (2) includes a diffraction grating having a local region (2a) of a relatively high refractive index and a local region (2) of a relatively low refractive index. The DLC film (2) can be easily deposited on the substrate (1) by plasma CVD, and the relatively high refractive index region (2a) in the DLC film can be easily formed by irradiating the film with an energy beam (4) such as an ion beam.

L'invention concerne un dispositif optique à diffraction produit d'une manière efficace et à faible coût. Un élément optique à diffraction à indice de réfraction modulé comprend un film transparent en DLC (c'est-à-dire en carbone similaire au diamant) (2) formé sur un substrat transparent (1), et le film en DLC (2) comprend un réseau de diffraction possédant une région locale (2a) ayant un indice de réfraction relativement élevé ainsi qu'une région locale (2) ayant un indice de réfraction relativement bas. Le film en DLC (2) peut être facilement déposé sur le substrat (1) au moyen d'un procédé CVD à plasma, et la région ayant un indice de réfraction relativement élevé (2a) dans le film en DLC peut être aisément formée par l'irradiation du film avec un faisceau d'énergie (4) tel qu'un faisceau d'ions.

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