Diffractive optical element

Details Diffractive optical element Diffractive optical element

G - Physics

02

B

G02B 5/18 (2006.01) B23K 26/00 (2006.01)

Patent

CA 2369063

The present invention provides a diffractive optical element having superior optical characteristics. A polycrystalline substrate having crystal grains whose sizes are not more than 1 µm or an amorphous phase at the dry-etched surface thereof, or an upper film layer 8 formed on a polycrystalline: substrate 1 being the same materials as that of the polycrystalline substrate 1, which has finer crystal grains than-those of the substrate. The upper film layer 8 is dry etched, and AR, coat 6 is formed thereon.

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