Discharge device and method for use in processing...

Details Discharge device and method for use in processing... Discharge device and method for use in processing...

H - Electricity

01

L

356/176

H01L 21/44 (2006.01) H01L 21/027 (2006.01)

Patent

CA 1118535

The present invention relates to an apparatus and method for making electrical connections between a conductive region through an insulating layer and more particularly to a method for use in the manufacture of semiconductor devices which prevents charge accumulation during exposure by a charged beam.

312138

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