Discharge excitation gas laser device

Details Discharge excitation gas laser device Discharge excitation gas laser device

H - Electricity

01

S

H01S 3/097 (2006.01) H01S 3/0971 (2006.01) H01S 3/0977 (2006.01)

Patent

CA 2058402

In a discharge excitation gas laser device such as an excimer laser device provided with laser medium gas and a pair of electrodes opposite to each other in a gas- tight vessel, the laser medium gas is discharge-excited while inverting the polarity of a DC pulse voltage applied to the pair of electrodes opposite to each other for every pulse. In this way distribution of atoms and ions constituting the laser medium gas in the discharge region including the neighborhood of the main electrodes is made uniform even at a high repetition rate oscilla- tion. Thus it is possible to realize a discharge excitation gas laser device having a good stability of DC pulse discharge without increasing unnecessarily the flow speed of the laser medium gas and no lowering in the pulse energy owing to a high efficiency operation.

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