Discharge exciting excimer laser device

Details Discharge exciting excimer laser device Discharge exciting excimer laser device

H - Electricity

01

S

H01S 3/03 (2006.01) H01S 3/038 (2006.01)

Patent

CA 2054756

ABSTRACT An object of the present invention is to increase a laser output and improve the insulating performance. The device according to the present invention comprises a pair of main discharge electrodes, a dielectric and an auxiliary electrode, the dielectric being formed to be cylindrical and having the side opposed to the main discharge electrodes formed into a flat plate-like portion, the auxiliary electrode being embraced within the dielectric leaving a space and being opposed to one of the main dishcarge electrode with the flat plate-like portion sandwiched therebetween. -14-

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